si-based pzt film 硅基pzt薄膜
nanosized PZT film 纳米晶PZT薄膜
nano-grained PZT film 纳米PZT膜
PZT thin film PZT铁电薄膜 ; PZT薄膜
PZT thick film PZT厚膜
pzt ferroelectric thin film pzt铁电薄膜
pzt ferroelectric film pzt铁电薄膜
ferroelectric pzt thin film 铁电薄膜
PZT piezoelectric thin film PZT压电薄膜
PZT film is one of the most useful functional materials and has been very widely used in MEMS.
基于该系统开发出了简单、可靠、可调性好并具有较高精度的PZT铁电薄膜介电性能测试系统。
In order to describe the characteristics of piezoelectric bimorph, properties of PZT film are studied by SEM and XRD.
为了更好地研究双晶片的特性，利用扫描电镜(sem)和x -射线衍射(XRD)技术，对PZT薄膜的特性进行了较为详细的研究。
Micro-patterning of PZT thin film is one of the key technologies in the fabrication of micro-sensors and micro-actuators made of PZT films.
PZT薄膜的微图形化是制备基于PZT薄膜微传感器和微驱动器的关键技术之一。
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