ferroelectric pzt thin film 铁电薄膜
pzt ferroelectric thin film pzt铁电薄膜
PZT piezoelectric thin film PZT压电薄膜
The structural and territorial design of PZT thin film micro-sensors is processed.
对硅基锆钛酸铅(PZT)压电薄膜微传感器进行了结构和版图设计。
Micro-patterning of PZT thin film is one of the key technologies in the fabrication of micro-sensors and micro-actuators made of PZT films.
PZT薄膜的微图形化是制备基于PZT薄膜微传感器和微驱动器的关键技术之一。
Piezoelectric material is applied as MEMS function material extensively. PZT thin film as one type of piezoelectric material with excellent piezoelectricity is studied by lots of scholar.
压电薄膜材料是适用于MEMS器件的功能薄膜材料，其中，PZT薄膜具有较高的压电性能，受到研究者的青睐。
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