PZT film is one of the most useful functional materials and has been very widely used in MEMS.
基于该系统开发出了简单、可靠、可调性好并具有较高精度的PZT铁电薄膜介电性能测试系统。
In order to describe the characteristics of piezoelectric bimorph, properties of PZT film are studied by SEM and XRD.
为了更好地研究双晶片的特性，利用扫描电镜(sem)和x -射线衍射(XRD)技术，对PZT薄膜的特性进行了较为详细的研究。
Micro-patterning of PZT thin film is one of the key technologies in the fabrication of micro-sensors and micro-actuators made of PZT films.
PZT薄膜的微图形化是制备基于PZT薄膜微传感器和微驱动器的关键技术之一。
To study the effects of pyrolysis temperature on the film orientation, we analyzed the PZT films which were fabricated with different pyrolysis temperature and same annealing condition.
研究了快速成膜技术中热分解温度对薄膜结晶取向的影响，分析了在相同退火条件下，分别采用不同热分解温度制备得到的薄膜的结晶状况。
A silicon based lead zirconate titanate (PZT) thick film technology by tape casting is studied in this paper.
研究了基于流延技术制备硅基锆钛酸铅(PZT)厚膜的工艺。
The experiments show that the PZT ferroelectric thin film with pe-roskite structure can be produced using reasonable process parameters.
实验表明，采用合适的工艺参数能制备出具有钙钛矿型结构的PZT铁电薄膜。
The structural and territorial design of PZT thin film micro-sensors is processed.
对硅基锆钛酸铅(PZT)压电薄膜微传感器进行了结构和版图设计。
In this paper, the piezoelectric thin film prepared by hydrothermal method has good piezoelectric performance by experiments. This study for the PZT thin film is the base for film's application.
实验验证，本文利用水热合成法制备的PZ T压电薄膜具有优良的压电性能，为压电薄膜在微泵上的应用奠定了基础。
The influence of the sintering time to the tape casting PZT thick film quality is analyzed and the optimum sintering time is concluded. The silicon based PZT thick film technology int...
分析了高温烧结时间对流延pzt厚膜品质的影响，确定了最优高温烧结时间。
Piezoelectric material is applied as MEMS function material extensively. PZT thin film as one type of piezoelectric material with excellent piezoelectricity is studied by lots of scholar.
压电薄膜材料是适用于MEMS器件的功能薄膜材料，其中，PZT薄膜具有较高的压电性能，受到研究者的青睐。
Experimental results indicated that the film on PZT had a excellent adhesive strength and a seawater corrosion resistant property.
实验结果表明：压电陶瓷表面化学镀的镀层具有优良的结合力和耐海水腐蚀性能。
Experimental results indicated that the film on PZT had a excellent adhesive strength and a seawater corrosion resistant property.
实验结果表明：压电陶瓷表面化学镀的镀层具有优良的结合力和耐海水腐蚀性能。
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