In this paper, the piezoelectric thin film prepared by hydrothermal method has good piezoelectric performance by experiments. This study for the PZT thin film is the base for film's application.
实验验证，本文利用水热合成法制备的PZ T压电薄膜具有优良的压电性能，为压电薄膜在微泵上的应用奠定了基础。
Piezoelectric material is applied as MEMS function material extensively. PZT thin film as one type of piezoelectric material with excellent piezoelectricity is studied by lots of scholar.
压电薄膜材料是适用于MEMS器件的功能薄膜材料，其中，PZT薄膜具有较高的压电性能，受到研究者的青睐。
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