分析了基于法布里珀罗腔的微光机电系统可调谐滤波器中，空气腔厚度与峰值波长间的关系。
The relation between the air gap thickness and the peak wavelength in micro-optical electromechanical system (MOEMS) optical tunable filter based on Fabry-Perot etalon is discussed.
最近几年来，微电子机械系统（MEMS）逐渐向光学方面渗透，在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统（MOEMS）。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
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