分析了基于法布里珀罗腔的微光机电系统可调谐滤波器中,空气腔厚度与峰值波长间的关系。
The relation between the air gap thickness and the peak wavelength in micro-optical electromechanical system (MOEMS) optical tunable filter based on Fabry-Perot etalon is discussed.
最近几年来,微电子机械系统(MEMS)逐渐向光学方面渗透,在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统(MOEMS)。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
最近几年来,微电子机械系统(MEMS)逐渐向光学方面渗透,在二十世纪九十年代中后期形成了全新的技术领域—微光机电系统(MOEMS)。
In recent years, with micro-electro mechanical systems (MEMS) penetrating gradually through optics, a full new technique field-micro-opto-electro- mechanical systems (MOEMS) came into being in 1990's.
应用推荐