RF-reactive magnetron sputtering 反应磁控溅射 RF magnetron reactive sputtering 磁控反应溅射 reactive RF magnetron sputtering 反应射频磁控溅射 ..
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直流反应磁控溅射TiN薄膜表面形貌研究--中国期刊网 关键词：TiN薄膜；反应磁控溅射；AFM；RMS [gap=247]Key words: TiN film；reaction magnetron sputtering；AFM；RMS
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... subject merger 学科融合 reactive magnetron spurting 反应磁控溅射 aerated concrete 加气混凝土 ...
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直流反应磁控溅射 DC reactive magnetron sputtering
射频反应磁控溅射技术 RF reactive magnetron sputtering
中频交流反应磁控溅射 mid-frequency alternative reactive magnetron sputtering
中频双靶反应磁控溅射 MF reactive dual magnetron sputtering
反应射频磁控溅射系统 Reactive Sputtering System
射频磁控反应溅射 radio frequency magnetron reactive sputtering
直流磁控反应溅射 DC magnetron reactive sputtering
Titanium nitride thin film is deposited on Si(111) substrate by DC reactive magnetron sputtering.
采用直流反应磁控溅射方法在Si(111)基底上沉积了氮化钛薄膜。
参考来源 - 溅射气压对磁控溅射TiN薄膜光学性能的影响Using the prepared ALM as template and under suitable conditions,the DC reactive magnetron sputtering technique was employed to deposit the nanostructured zinc oxide films on the template.
采用直流反应磁控溅射法在这种新型模板上沉积得到氧化锌纳米结构薄膜。
参考来源 - 新型模板法制备ZnO纳米结构薄膜及其光学性能研究·2,447,543篇论文数据，部分数据来源于NoteExpress
研究了反应磁控溅射的动力学过程。
The kinetic process of reactive magnetron sputtering has been studied.
反应磁控溅射被广泛应用于制备化合物薄膜。
Reactive magnetron sputtering was used to prepare many kinds of compound films extensively.
利用低频反应磁控溅射制备五氧化二铌光学薄膜。
Niobium oxide optical thin films have been prepared by low frequency reactive magnetron sputtering system.
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