等离子体源离子注入 PSII ; Plasma source ion implantation
ECR等离子体源 ECR plasma source
双等离子体源 duoplasmatron source
金属等离子体源 metal plasma source
微波等离子体源 Microwave plasma source
常压等离子体源 atmospheric-pressure plasma reactor
霍尔等离子体源 hall plasma source
高密度等离子体源 High density plasma sources
等离子体源离子渗氮 plasma source ion nitriding
研制了一种新的大面积微波等离子体源。
A new large area microwave plasma source has been developed.
文章介绍了空间等离子体源与测试系统的设计方法。
The design method for space plasma source and measurement system is introduced in this paper.
本文叙述了辉光放电等离子体源的等离子体源离子注入。
In this paper, a glow discharge plasma source ion implantation technique is described.
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