... 投影几何学：projective geometry 投影光刻：Projection lithography 投影光度测量法：projection photometry ...
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... projection lens jacket 投影透镜套 projection marking 投影光刻 projection microscope 投影显微镜 ...
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... projection printer 投影式对准曝光装置 projection printing 投影光刻 projection reduction scale 投影缩小比例 ...
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投影光刻机 [电子] projection mask aligner
自动投影光刻机 automatic projection photoetching machine
投影光刻法 projection photolithography
离子束投影光刻 ion-beam projection lithography ; IPL ; Ion beam project lithography
电子束投影光刻 electron projection lithography
离子投影光刻机 ion projection lithography machine
离子投影光刻 ion projection lithography
射线投影光刻 SXPL
极紫外投影光刻 EUVL ; Extreme Ultraviolet Lithography
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介绍投影光刻机设备的晶片传输系统中切边探测和晶片预对准技术。
Mostly introduction the of detection and the of prealignment technology of the Wafer Loader system in the Projection-Lithography equipment.
掩模制作是电子束散射角限制投影光刻(SCALPEL)的关键技术。
Mask fabrication is a key technique of scattering with angular limitation projection electron-beam lithography (SCALPEL).
大视场投影光刻物镜是光学系统中的一种特殊的形式，其设计加工要求高。
The large field projection lithography lens is a special optical lenses form, which put an high demands on the design and processing both for mechanical and optical.
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