③Piezoelectric micro-cantilever was designed for AFM system.
③对AFM系统的压电微悬臂进行设计。
参考来源 - IPC·2,447,543篇论文数据，部分数据来源于NoteExpress
本文介绍了这个系统的微悬臂的设计和研制。
In this paper, we introduce design and development of cantilever in the system.
实验表明，这种微悬臂使系统可以达到纳米量级的分辨率。
It is demonstrated that the cantilever make the system have nanometer level resolution.
微悬臂列阵传感器在生物检测方面具有快速、痕量和非标记的特性。
A method to increase the detection sensitivity and to speed up analysis of microcantilever array biosensor is reported.
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