本文介绍了这个系统的微悬臂的设计和研制。
In this paper, we introduce design and development of cantilever in the system.
提出一种用于单电子自旋探测微悬臂梁的制作方法。
In this paper we have designed and fabricated the ultra-sensitive cantilevers for single electron spin detection.
本文将BP网络算法应用在微悬臂梁力学特性的研究中。
In this paper, we study the mechanical properties of micro-cantilever beam based on BP network algorithm.
在检测微悬臂梁频率响应特性的实验中得到了较好的结果。
The system and the circuits have been successfully applied to measure the frequency response of the cantilever.
实验表明，这种微悬臂使系统可以达到纳米量级的分辨率。
It is demonstrated that the cantilever make the system have nanometer level resolution.
采用微细加工技术制作出无基底的双材料微悬臂梁阵列结构。
The micro-electromechanical system (MEMS) technology is adopted to fabricate the substrate-free bi-material micro-cantilever arrays.
微悬臂列阵传感器在生物检测方面具有快速、痕量和非标记的特性。
A method to increase the detection sensitivity and to speed up analysis of microcantilever array biosensor is reported.
本文提出一种基于FPGA的数字式提高微悬臂梁品质因数的方法。
A new digital method based on FPGA was introduced in this paper to amplify the quality factor of micro cantilever.
微悬臂梁是一种结构简单、易于进行微加工以及大量生产的传感器结构。
Microcatilever is a kind of simple sensor configuration that is easily micromachined and mass produced.
设计了一种硅微悬臂梁结构，在低频环境中以压电厚膜进行信号转换、谐振。
A silicon micro cantilever structure with piezoeLectric thick film was designed for low frequency operations.
在轻敲工作模式下，原子力显微镜（AFM）压电微悬臂以较大的振幅振动。
Working at tapping mode, atomic force microscope(AFM) piezoelectric microcantilever vibrates with large amplitude.
此红外探测仪的核心器件焦平面阵列（FPA）由无硅基底结构的微悬臂梁阵列构成。
The IR detector contains a focus plane array (FPA) which is fabricated into an array of bi-material microcantilevers in the form of single-layer membranous structure without Si-base.
微悬臂梁在液体中，工作在动态模式时，品质因数的提高问题一直是国内外研究的焦点。
When it works in liquids in dynamic mode, the enhancement of the quality factor has always been a research hotspot.
在弯曲测试实验中，通过标定测试用AFM微悬臂梁的有效长度，从而修正了其弹簧常数。
In bending test, the spring constant of AFM micro cantilever is corrected through the calibration of its effective length.
压电微悬臂在AF M中的应用是近十年的研究工作，一般用于位移传感、力传感和高速反馈定位。
The research on the AFM application of micro piezoelectric cantilever is carried in these ten years, generally utilized in displacement sensing, force sensing and fast feedback orientation.
提出一种基于傅里叶变换的频闪显微干涉测试方法，对微谐振器和微悬臂梁的离面运动进行测试研究。
A stroboscopic microscopic interferometry based on Fourier transform method (FTM) is put forward to measure the out-of-plane motion of micro-resonator and micro-cantilever.
多晶硅微悬臂梁是MEMS中的一个基本结构，作为机电结合的元件，在MEMS中具有不可替代的位置。
Poly—silicon micro—cantilevers is a basic structure, as a combination of mechanical and electrical components, place an irreplaceable part in MEMS.
运用该方法在研究微悬臂梁的弯曲形变过程中，必须考虑压头在微悬臂梁上的压入以及微悬臂沿宽度方向的挠曲。
The method was described clearly. In the deflection of microbeams, the influence of the indenter tip pushing into the top of the microbeams and the curvature across its width must be considered.
将微悬臂梁和微薄膜振动特性的测量结果与频率扫描法的测试结果进行了比对，对产生的误差及误差来源进行了分析。
The testing error and the reason of error are analyzed, compared with the results received by the sweep-frequency measurement method.
为此，以矩形压电微悬臂梁结构作为换能单元，通过对压电层等效电流源和单相桥式整流电路的理论及相关公式的推导，得出微能量功率的计算公式。
An energy harvesting structure based on rectangle piezoelectric microcantilever was set up and the process of energy transform from vibration to electric was generally analyzed.
其必须冷却到50微K，以尽可能的减小热振动，因为热振动会干扰悬臂的磁场，而这个磁场又是产生位移信号的关键。
The system must be cooled to 50 millikelvins to minimize thermal vibrations, which interfere with the cantilever’s magnet-induced displacement signal.
以超高密度信息存储技术为应用背景，设计了低刚度高谐振频率的新型微压电悬臂梁探针，并安排了探针加工工艺流程。
Based on the applications in ultra-high-density data storage, a novel micro piezoelectric cantilever is designed, and the probe fabrication process arrangement is made as well.
通过微位移架上的位移测量实验与悬臂梁上的应变测量实验，结果表明该光纤应变片提供了同时适合于应变与形变的检测方式。
The measuring results for the micro displacement and the strain indicate that the optic fiber strain gauge offers a monitoring method both strain and distortion.
高分子薄膜的微力学悬臂梁感应器研究。
Thin polymer films investigated by micromechanical cantilever sensors.
介绍了微电镀原理和设计了微电镀平台，设计了悬臂梁的微电镀工艺流程。
The fabricating process of the beam was designed after the micro -electroplating principle and the micro -electroplating plat form were introduced.
第三章给出了等截面悬臂梁微开关的微机械加工工艺，设计了掩膜版及具体的工艺参数。
Chapter three: Presents the fabrication process of micro-switch with cantilever beam and designed the masks.
针对成型电极在微细加工中暴露出的缺点，提出了利用旋转微细电极像微铣刀一样进行微细电解铣削新工艺，加工出高精度型孔和悬臂梁等微结构。
The new process of electrochemical milling by rotating microelectrode like micro milling-(cutter) was proposed, and micro profiled hole and micro beam with high precision can be milled.
利用梯度功能压电执行器设计和制作了双悬臂梁结构的微夹钳，用作微型机器人操作系统的操作手。
A pair of functionally gradient piezoelectric cantilevers was used to fabricate a microgripper, which is used as the micromanipulator of micro robot operating system.
详细讨论了压电悬臂梁的数学模型以及受力模型，分别分析了压电双晶片的微位移-电压、夹持力-应变的关系；
In addition, we modeled the piezoelectric bimorph and make the micro-force analyses, and got displacement-voltage relationship and force-strain relationship theoretically.
详细讨论了压电悬臂梁的数学模型以及受力模型，分别分析了压电双晶片的微位移-电压、夹持力-应变的关系；
In addition, we modeled the piezoelectric bimorph and make the micro-force analyses, and got displacement-voltage relationship and force-strain relationship theoretically.
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