设计了一种硅微悬臂梁结构，在低频环境中以压电厚膜进行信号转换、谐振。
A silicon micro cantilever structure with piezoeLectric thick film was designed for low frequency operations.
多晶硅微悬臂梁是MEMS中的一个基本结构，作为机电结合的元件，在MEMS中具有不可替代的位置。
Poly—silicon micro—cantilevers is a basic structure, as a combination of mechanical and electrical components, place an irreplaceable part in MEMS.
此红外探测仪的核心器件焦平面阵列（FPA）由无硅基底结构的微悬臂梁阵列构成。
The IR detector contains a focus plane array (FPA) which is fabricated into an array of bi-material microcantilevers in the form of single-layer membranous structure without Si-base.
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