随着人们对低压CVD合成金刚石薄膜技术的深入研究,金刚石薄膜的质量有了很大的提高。
With the deeply investigation of synthesizing technique by low pressure CVD, the quality of diamond film is improved greatly.
和CVD方法以及常压等离子体喷涂方法制备的钨涂层相比,低压等离子体喷涂具有明显的优势。
The technical advantages of vacuum plasma spray over conventional chemical vapor deposition(CVD) and air plasma spray in tungsten coating were also discussed.
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