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The measurement accuracy was sub-micron grade.
测量精度为亚微米量级。
The hot carrier effects (HCE) in deep sub-micron devices has been studied.
对深亚微米器件中热载流子效应(hce)进行了研究。
Thin films are widely used in MEMS with different thicknesses from micron, sub-micron to nanometer scale.
MEMS中大量使用薄膜材料，厚度可达微米、亚微米直至纳米量级。
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