micro hotplate 微热板
micro hotplate array 微热板阵列
semiconductor sensor based on micro-hotplate 微加热板式半导体传感器
The finite element method (FEM) is utilized to simulate the thermal characteristics of micro-hotplate and provide a theoretical guidance for optimizing the device’s structure.
用有限元方法对陶瓷微热板的热特性进行模拟,为器件结构的优化提供理论指导。
参考来源 - 陶瓷微加工钯掺杂一氧化碳气体传感器的研究·2,447,543篇论文数据,部分数据来源于NoteExpress
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