The finite element method （FEM） is utilized to simulate the thermal characteristics of micro-hotplate and provide a theoretical guidance for optimizing the device’s structure.
用有限元方法对陶瓷微热板的热特性进行模拟,为器件结构的优化提供理论指导。
参考来源 - 陶瓷微加工钯掺杂一氧化碳气体传感器的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
The design of the tungsten micro-hotplate can be applied to other thermal-based sensors in the standard CMOS process.
本文的钨微热板的设计可以应用到相关的与标准CMOS工艺兼容的热传感器的设计之中。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
针对微热板式微气压传感器的静态和动态性能测试，对传感器的真空测试环境进行了实时控制仿真。
应用推荐