The design of the tungsten micro-hotplate can be applied to other thermal-based sensors in the standard CMOS process.
本文的钨微热板的设计可以应用到相关的与标准CMOS工艺兼容的热传感器的设计之中。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
针对微热板式微气压传感器的静态和动态性能测试，对传感器的真空测试环境进行了实时控制仿真。
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
针对微热板式微气压传感器的静态和动态性能测试，对传感器的真空测试环境进行了实时控制仿真。
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