micro-hotplate 微热板
micro hotplate array 微热板阵列
semiconductor sensor based on micro-hotplate 微加热板式半导体传感器
Ceramic micro hotplate can be used for low-power, high temperature gas sensors.
陶瓷微热板可用于低功耗、高温气体传感器中。
参考来源 - 陶瓷微加工钯掺杂一氧化碳气体传感器的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
Aiming at the static and dynamic performance tests of the micro gas pressure sensor with micro-hotplate, an automatic control system were established, which could maintain steady vacuum degree.
针对微热板式微气压传感器的静态和动态性能测试，对传感器的真空测试环境进行了实时控制仿真。
The design of the tungsten micro-hotplate can be applied to other thermal-based sensors in the standard CMOS process.
本文的钨微热板的设计可以应用到相关的与标准CMOS工艺兼容的热传感器的设计之中。
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