The optimization of the MEMS fabrication process is analyzed.

分析了MEMS制作工艺的改进。

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The kernel problem in virtual MEMS fabrication process is process model.

MEMS加工工艺的核心是工艺模型。

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Introduces wafer bonding process, technical requirements, application choice and Interaction for MEMS, and showing MEMS fabrication technology and application prospects.

介绍了晶圆键合工艺、技术要求、应用选择以及对MEMS的作用；展示了MEMS制造技术和应用前景。

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The technology is based on highly efficient solid oxide fuel cells (SOFCs) and microelectromechanical systems (MEMS) wafer fabrication methods, including key nanotechnology elements, and is fueled by recyclable high energy power cartridges, or pods.

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