The optimization of the MEMS fabrication process is analyzed.
分析了MEMS制作工艺的改进。
The kernel problem in virtual MEMS fabrication process is process model.
MEMS加工工艺的核心是工艺模型。
Introduces wafer bonding process, technical requirements, application choice and Interaction for MEMS, and showing MEMS fabrication technology and application prospects.
介绍了晶圆键合工艺、技术要求、应用选择以及对MEMS的作用；展示了MEMS制造技术和应用前景。
In the design and fabrication of MEMS devices, MEMS fabrication process based on Silicon is a main technology, to which is deeply paid attention by researchers and industries.
在MEMS器件的设计与加工过程中，键合技术是体硅工艺的一项关键技术。
In this paper, we introduce some basic conceptions of RF MEMS switch such as the switch parameters, classification, typical fabrication process and design considerations.
本文着重介绍了RFMEMS开关的基本参数、分类以及典型制造工艺和设计时考虑因素等一些基本的概念。
LIGA technology play a very important role in the fabrication of MEMS.
LIGA技术在微机械结构的制作中具有很重要的作用。
The design and fabrication of a capacitive series RF MEMS switch is reported.
介绍了一种串联电容式RFMEMS开关的设计与制造。
Design, fabrication and test results of DC-contact Cantilever RF MEMS Series Switches are reported.
报道了悬臂梁接触式RFMEMS开关的设计、制作和测试结果。
This paper presents a novel method for the fabrication of micro electromagnetic relays based on MEMS technology.
本文探讨了一种基于MEMS技术的微型电磁继电器的制造工艺。
The study on fabrication process of a high k capacitive MEMS switch is presented.
介绍了一种电容式MEMS开关的制作工艺。
The MEMS skin composed of a flexible substrate layer, a metal electrode layer and a micro-well-array layer was designed, and two process routes based on MEMS were developed for the skin fabrication.
设计了一种包含柔性基底层、金属电极图案层和微凹坑阵列层的三层式蒙皮结构，提出了两种基于MEMS工艺的制作方法。
In this paper, the feature and the development trend of the MEMS technology are introduced. And the operational principles and the fabrication craft of the magnetic micro-actuator with a mult...
介绍了MEMS的特点、特征、技术发展趋势，MEMS器件的类型及其功能，并以多层弯曲磁芯结构微执行器为例介绍了磁驱动微执行器工作原理与制作工艺过程。
A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
Study on designing of sensor device's structures and whole reasonable fabrication process, which are two key issues of uncooled infrared bolometer that based on MEMS technique.
本论文对实现基于MEMS工艺技术的非制冷型红外测辐射热计的两个主要关键内容进行了深入研究，即敏感器件结构的设计和整个制造工艺流程的合理设计。
In the research on MB microsystem based on MEMS technology, the design and fabrication of a MB chip is the key process.
在基于MEMS技术的磁珠微系统的研究中，磁珠操控芯片的设计和制作工艺是其中的关键。
Results of the research and experiments in this paper are beneficial to deign and fabrication of micro pressure sensors. The micro machining technology can also be used for other MEMS products.
论文的相关研究和实验结果对于微压力传感器的设计、制作具有一定的参考价值，微加工工艺的相关研究结论也可以应用在其它微机电器件的制作上。
Based on comparing all kinds of MEMS optical-switches and based on the current ability of techniques, this dissertation accomplishes the design and fabrication of the switch.
本论文在比较各种类型光开关的特点的基础上，结合现有的工艺条件，完成了一种使用常规体硅微机械加工工艺实现的光开关的设计和制作。
An online type microwave power sensor structure is presented based on MEMS technology. The theory, design, fabrication and measurement are given.
提出了一种基于MEMS技术白勺在线式微波功率传感器构造，并对该构造停止了理论分析、设计、制作和测量。
In the chapter 5, Based on the MEMS technology, a method of fabrication of micro EHD pump is presented.
第五章利用MEMS技术，初步研究了一种用于被动传热的微型ehd泵的工艺。
Furthermore, the process of design and virtual fabrication of a new MEMS device, micropump, verified the system "s expansibility."
进一步用一种全新的器件微流量泵的工艺设计和虚拟加工过程验证了系统的可扩充性。
Study on Simulation and Fabrication of Magnetic Bead Microchip Based on MEMS Technology;
利用微磁学的有限元法，模拟计算了样品的磁滞回线。
Study on Simulation and Fabrication of Magnetic Bead Microchip Based on MEMS Technology;
利用微磁学的有限元法，模拟计算了样品的磁滞回线。
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