Si Substrate si衬底
Si-substrate 硅基
on si substrate 硅基片上
HR-Si substrate 高阻硅衬底
high-resistivity Si substrate 高阻率硅衬底
heavily B-doped Si substrate 重掺硼硅衬底
In addition, with the increasing distance between the filament and the substrate, the crystalline volume fraction and the grain size of poly-Si films notablely decrease.
另外,随着热丝与衬底间距的增大,沉积出的多晶硅薄膜样品的晶化率明显减小,薄膜的晶粒尺寸也相应减小。
In this paper, we have studied a preparation and structure of ceramic silicon sheets for substrate of poly-Si thin film solar cells.
文章研究了用来作为多晶硅薄膜太阳电池衬底的陶瓷硅材料的制备方法及其结构。
Epitaxy of strained Si on the obtained SGOI substrate.
在获得的SGOI衬底材料上生长高质量应变硅材料。
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