通过制备掺铝氧化锌(ZAO)薄膜及SEM断口观察进行实验验证，证实该修正方法有助于提高膜厚测量精度。
The experiment of measuring the thickness of ZAO film and SEM fracture inspection proves that the method of correction is useful to improve the measurement precision.
用热等静压法烧结制备了高导电性ZAO（铝掺杂氧化锌）陶瓷靶材，并用直流磁控溅射法制备出ZAO透明导电薄膜。
Aluminum-doped zinc oxide (ZAO) ceramic targets for sputtering were fabricated by hot isostatic pressing (HIP) and ZAO transparent conducting thin films were prepared by dc magnetron sputtering.
利用x射线衍射法对铜—锌和铜—锌—铝系低压合成甲醇催化剂还原态的结晶铜和氧化锌晶格畸变进行测定。
The crystal copper and distorted zinc oxide lattice of reduced low-pressure synthetic catalyst of methanol are studied with XRD.
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