• 1. Reactive Ion Etching: 反应离子刻蚀 | 反应离子腐蚀 | 反应性离子蚀刻
• 2. Deep Reactive Ion Etching: 深层离子蚀刻技术 | 深反应离子刻蚀 | 离子蚀刻技术 | 利用深反应离子蚀刻
• 3. Reactive Ion Etching System: 反应离子刻蚀系统

更多释义

• 1.This accelerometer is fabricated by N type silicon wafer. To obtain high aspect ratio structure, deep reactive ion etching(DRIE) process is employed.
  加速度计用普通的N型硅片制造，为了刻蚀高深宽比的结构，使用了深反应离子刻蚀（DRIE）工艺。
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• 2.Yak hairs were treated by the microwave electron cy cl otron resonance plasma reactive ion etching(ECR-RIE) equipment to improve its property of weave.
  采用微波电子回旋共振等离子体反应离子刻蚀（E CR-R IE）装置对牦牛毛纤维进行表面改性，从而改善牦牛毛的可纺性。
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• 3.The gated silicon field emitter arrays (FEA) with small gate aperture have been successfully fabricated by dry etching, including ion beam etching (IBE) and reactive ion etching (RIE).
  利用离子束刻蚀(IBE)和反应离子刻蚀(RIE)等干法刻蚀方法来制造带栅极的场发射阴极阵列。
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