本文介绍了这个系统的微悬臂的设计和研制。
In this paper, we introduce design and development of cantilever in the system.
实验表明，这种微悬臂使系统可以达到纳米量级的分辨率。
It is demonstrated that the cantilever make the system have nanometer level resolution.
实验表明，这种微悬臂使系统可以达到纳米量级的分辨率。
It is demonstrated that the cantilever make the system have nanometer level resolution.
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