介绍了一种无刻蚀直流镀铁工艺。
The process of iron plating without etching pretreatment was studied.
随着气体流量的增加，刻蚀速度不断降低。
With the increase of flow of the gas, the etching rate decreases continually.
刻蚀工艺的分辨率是图形转移保真度的量度。
The resolution of an etching process is a measure of the fidelity of pattern transfer.
刻蚀工艺的分辨率是图形转移保真度的量度。
The resolution of an etching process is a measure of the fidelity of pattern transfer .
本文介绍微波等离子体刻蚀应用的实验结果。
In this paper, the result of etching application with microwave plasma will be introduced.
在湿法刻蚀诱导坑时，需适当延长刻蚀时间。
该装置具有结构简单，低损伤和各向异性刻蚀的优点。
It has advantages of sample structure, low damage and anisotropic etching.
当能刻蚀的材料不存在时，这些物种就具有较长的寿命。
The species has a long lifetime in the absence of etchable material .
金属极板还被深度刻蚀，从而极大地扩展了其表面的面积。
The metal plate is also deeply etched so as greatly to increase its surface area.
对硅的干法刻蚀技术是现代半导体工业中非常重要的一项工艺。
Dry etching technique of silicon is a very important process in the modern semiconductor industry.
对硅的干法刻蚀技术是现代半导体工业中非常重要的一项工艺。
Dry etching technique of silicon is a very important process in the modern semiconductor industry.
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