The source material for a sputtering process.
溅射工艺用源材料。
Three pole reaction sputtering has the properties of simple equipment, easy process and fined film.
三极反应溅射具有设备简单，工艺简便，镀层致密等特点。
Three pole reaction sputtering has the properties of simple equipment, easy process and fined film.
三极反应溅射具有设备简单，工艺简便，镀层致密等特点。
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