At last, two kinds of models are Elaborated on MEMS device and its packaging.
阐述了MEMS器件及其封装中主要的两种模型。
Provided is a MEMS device 800 comprising an integrated post and deformable layer 870.
本发明提供一种微机电系统（MEMS）装置800，其包括集成柱和可变形层870。
The MEMS device has wonderful functionality, controllability, integration, robustness and so on.
MEMS器件具有很好的功能性、集成性、可控性和鲁棒性等等。
The experiments of simulation and application for actual MEMS device were done by proposed algorithms.
用已提出的算法，进行了模拟实验和应用在实际MEMS器件中的实验。
In the design of MEMS device, a main problem is to lack the variation method of orienting optimization.
现有的微机电系统(MEMS)设计中缺乏面向优化的MEMS器件变动方法。
Furthermore, the process of design and virtual fabrication of a new MEMS device, micropump, verified the system "s expansibility."
进一步用一种全新的器件微流量泵的工艺设计和虚拟加工过程验证了系统的可扩充性。
Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device.
本文基于机器微视觉的MEMS动态测试系统，设计了一套频闪驱动电路，用于采集高速运动的MEMS器件的清晰图像。
The research indicated that MEMS device generate excellent control effect on asymmetric vortices over slender body as well as on complex flow field.
研究表明：MEMS器件对控制大迎角细长旋成体非对称涡和复杂流场具有良好的控制能力。
MEMS safety discriminator is a class of safety device for high consequence systems, also termed as micro lock, micro combination lock, micro discriminator or micro use control switch.
微机电安全密码锁是一类用于确保“要害系统”安全性的装置，也可称为微锁、微型组合锁、微型密码鉴别器或微型使用控制开关。
In the design of MEMS, the resolution model of every essential device, the accurate numeric analysis and calculation are required to achieve more precise and rational analyzed results.
在MEMS器件设计中，综合各基本器件的精确分析结果，才能保证设计的合理性与准确性，这就需要建立器件的解析模型，并能够对其进行精确的数值分析与计算。
MEMS , owning the advantages of ultra fine integrate process , miniaturization, low cost, high reliability and batch manufacturing, pose very promising future in the micro electric contact device.
微机电系统（MEMS）技术凭借其超精密集成加工的特点，具有微型化、低成本、高可靠性和可大批量生产等优势，在微电接触器件领域大有可为。
Optical switch is an important functional device in optical fibre communication networks, MEMS optical switch is one of the most promiseful optical switches.
光开关是光通信网络的重要功能器件，MEMS光开关是最具发展前景的光开关之一。
High-g MEMS accelerometer sensor is the key device for measuring acceleration during high shock process.
高量程MEMS加速度传感器是测量高冲击过程的核心器件。
MEMS inertial measurement unit is an accelerometer and gyroscope combination device, developed by using MEMS technology. It has small volume, low cost and high reliability.
MEMS惯性测量单元是采用MEMS技术研制的加速度计和陀螺组合器件，它具有体积小、成本低、可靠性高等优点。
To improve the sense of immersion and training effects of human detection input device for the virtual training software, the system of human motion detection based on DSP and MEMS was designed.
为解决现有虚拟训练软件的人体动作输入设备沉浸感和训练效果不足的问题，采用DSP和微机电系统(MEMS)构建人体动作识别系统。
A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
Micro (small) thermoelectric generation device is one of the research programs for Power MEMS.
微小型热电电源是其中的一种得到开展的研究课题。
This paper gives a design scheme of input device based on MEMS accelerometers: use accelerometers to detect the user's motion.
文章提出了一种基于MEMS的输入系统的设计方案，即将加速度计运用于电脑输入系统中，通过加速度计信号来解析用户的动作。
This paper gives a design scheme of input device based on MEMS accelerometers: use accelerometers to detect the user's motion.
文章提出了一种基于MEMS的输入系统的设计方案，即将加速度计运用于电脑输入系统中，通过加速度计信号来解析用户的动作。
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