Provided is a MEMS device 800 comprising an integrated post and deformable layer 870.
本发明提供一种微机电系统（MEMS）装置800，其包括集成柱和可变形层870。
The MEMS device has wonderful functionality, controllability, integration, robustness and so on.
MEMS器件具有很好的功能性、集成性、可控性和鲁棒性等等。
Furthermore, the process of design and virtual fabrication of a new MEMS device, micropump, verified the system "s expansibility."
进一步用一种全新的器件微流量泵的工艺设计和虚拟加工过程验证了系统的可扩充性。
Based on MEMS dynamic testing system this paper designs a set of stroboscopic driving circuits to acquire clear image of high speed MEMS device.
本文基于机器微视觉的MEMS动态测试系统，设计了一套频闪驱动电路，用于采集高速运动的MEMS器件的清晰图像。
The research indicated that MEMS device generate excellent control effect on asymmetric vortices over slender body as well as on complex flow field.
研究表明：MEMS器件对控制大迎角细长旋成体非对称涡和复杂流场具有良好的控制能力。
A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
A micron-precision optical alignment system is developed for three-dimensional Micro Electro-Mechanical System(MEMS) device fabrication based on multi-layer imprint lithography.
针对基于微压印成形三维MEMS器件制造工艺多层压印的需要，开发了一套基于视频图像对正原理的压印光刻对准系统。
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