Provided is a MEMS device 800 comprising an integrated post and deformable layer 870.

本发明提供一种微机电系统（MEMS）装置800，其包括集成柱和可变形层870。

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The MEMS device has wonderful functionality, controllability, integration, robustness and so on.

MEMS器件具有很好的功能性、集成性、可控性和鲁棒性等等。

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Furthermore, the process of design and virtual fabrication of a new MEMS device, micropump, verified the system "s expansibility."

进一步用一种全新的器件微流量泵的工艺设计和虚拟加工过程验证了系统的可扩充性。

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One of the smallest MEMS microphones found by iSuppli is a device just over 1mm thick.

ECONOMIST: Noise-cancelling technology

But from a product standpoint, the fastest growth will be seen in conventional device categories like accelerometers and radio frequency MEMS that target consumer applications.

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