cathode target 阴极靶
unbalanced magnetron cathode target 磁控靶
target cathode 靶阴极
cathode-beam target 阴极射柱靶
target cathode-beam 阴极〔电子〕束靶
The composition generally changes from alloy cathode target to alloy coating deposited by multi arc ion plating to some extent.
采用多弧离子镀制备的合金涂层成分与合金阴极靶之间通常存在一定程度的偏差。
The plasma source ion implantation device consists of pulsed negative high voltage power, hot cathode arc discharge system, vacuum chamber and target stage, vacuum system and monitor system.
等离子体源离子注入装置由脉冲负高压源系统、热阴极弧放电系统、真空室及样品台、真空系统和监测系统等五部分组成。
A new multiple hollow cathode sputtering target which has a simple structure and a high sputtering rate, was put forward.
研制了一种由多个空心阴极并列组合而成的可直接作为溅射靶的多重空心阴极溅射靶。
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