cathode-target 阴极靶
unbalanced magnetron cathode target 磁控靶
target cathode 靶阴极
cathode-beam target 阴极射柱靶
target cathode-beam 阴极〔电子〕束靶
The composition generally changes from alloy cathode target to alloy coating deposited by multi arc ion plating to some extent.
采用多弧离子镀制备的合金涂层成分与合金阴极靶之间通常存在一定程度的偏差。
This demixing effect leads to the difficulties in the control of alloy composition of coating and in the design of composition of alloy cathode target.
这种离析效应导致了合金涂层成分控制及合金靶材成分设计的困难。
The new concept of the vacuum pipe sputter self-coating is introduced first, and special cathode target structure is introduced to get favorable coating.
首先提出真空管道自体真空镀膜新概念，采用特殊的阴极靶结构设计成功的解决了长管道内表面直流溅射镀膜的难题。
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