...您听说过“纳米光刻（nanolithography）”吗？这是一种使用透明的纳米级球体构建3D结构的工艺，主要用于电子、生物医药，甚至是光子应用等领域。
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nanometer lithography纳米光刻 In the application of nanometer lithography, two gratings with similar periods were chosen for alignment marks on the wa...
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出热化学纳米光刻术 TCNL
蘸笔纳米光刻术 Dip-pen Nanolithography ; DPN
笔纳米光刻术 Dip-pen nanolithography ; DPN
蘸水笔纳米光刻术 dip-pen nanolithography
用蘸水笔纳米光刻术 dip-pennanolithography ; DPN
纳米压印光刻 NIL ; Nanoimprint lithography ; nanoimprinting lithography
纳米压印光刻技术 nanoimprint lithography ; NIL
紫外纳米压印光刻 ultra-violet nanoimprint lithography
模具是纳米压印光刻 Nanoimprint lithography ; NIL
本文综述了深亚微米光刻和纳米光刻技术。
In this article, deep submicron lithography and nano processing are reviewed.
纳米光刻技术是制作纳米结构的基础，具有重要的应用前景。
The fabrication of nanostructures, an important part of nanotechnology, is based upon nanolithography which will be widely employed in the future.
具有角度限制的电子束投影曝光技术有可能成为21世纪最有潜力的纳米光刻技术之一。
The projection electron beam lithography with angular limitation(PEBL)is potentially one of the most attractive techniques for nano lithography in the21st Century.
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