白光扫描干涉法在三维表面形貌的测量中有着广阔的应用前景。
Scanning white-light interferometry for 3D surface topography has a wide application.
此方法已成功地应用于自行研制的衍射光学元件三维表面形貌测量系统中。
The method has been successfully used in the system for measuring the 3-d surface topography of diffractive optical elements.
最后利用三维表面形貌仪，分别对湿法刻蚀和干法刻蚀的磁头结构进行了数据分析。
The etching parameters and the photos of the head slider were presented. 3D surface microstructures of the head sliders were analyzed by Vecco MHT-III interferometer.
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