依据白光干涉理论，研制了垂直扫描白光干涉表面三维形貌测量仪。
Based on the white-light interference, a vertical scanning white-light interfering profilometer was designed.
本文介绍采用触针式轮廓仪与通用微型机相连的表面三维形貌测量系统。
In this paper, a three-dimensional measuring system for surface asperities is described, in which a microcomputer is interfaced to a stylus profilometer.
为了实现强反射表面三维形貌的光学非接触测量，提出一种改进的投影栅相位法。
An improved non-contact optical measuring method, projected fringe profilometry, is proposed to realize the 3-d structure measurement of high reflective surfaces.
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