快速热处理(RTP, Rapid Thermal Process)是半导体集成工艺中不可缺少的重要工序之一,其工作原理是在一定的温度和气体环境下,使晶圆表面发生一系列...
基于218个网页-相关网页
实验比较了常规热处理(conventional thermal annealing,CTA)和快速热处理(rapid thermal annealing,RTA)方式,用X射线衍射和能量散射X射线能谱研究了热处理方式和热处理制度对薄膜方阻的影响,分别得到了CTA...
基于8个网页-相关网页
...快速热处理;电阻率。 [gap=1808]Key words: P-type polycrystalline silicon thin film; crystallization; rapid heat treatment; resistivity.
基于8个网页-相关网页
首次将快速热处理(RTP)引入到快中子辐照直拉硅的内吸杂工艺中。
Rapid thermal process (RTP) was first used in the intrinsic gettering (IG) process of fast neutron irradiated CZSi.
将快速热处理(RTP)引入到快中子辐照掺氮直拉硅的内吸杂工艺中。
Rapid thermal process (RTP) was used in the intrinsic gettering (IG) process of fast neutron irradiated CZSi.
研究了高温快速热处理(RTP)对重掺砷直拉硅片中的原生氧沉淀的消融作用。
The annihilation of grown-in oxygen precipitates in heavily As-doped CZ silicon by rapid thermal processing (RTP) was investigated.
应用推荐