快速热处理温度、时间、降温速度、退火气氛、掺杂原子等都对硅片中点缺陷的形成及分布产生影响,进而影响氧沉淀的形成。
The RTP temperature, the RTP time, the cooling rate, the ambient and the dopant atoms influenced the density and distribution of point defects in wafers, and then affected oxygen precipitates.
并结合热处理实验,采用任意分布光束热作用快速计算的数学工具对热作用结果进行比较研究。
Combining with the experiments of heat treatment, heat action results are compared by using fast calculation math tool of heat action of arbitrarily distributed beam.
快速铁路是束热处理铝合金型材中空截面,给高强度下的扭转和挠度应力。
The Speedy Rail beam is a heat-treated aluminium alloy profile with hollow cross-sections that give it high strength under torsion and deflection stresses.
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