首次将快速热处理(RTP)引入到快中子辐照直拉硅的内吸杂工艺中。
Rapid thermal process (RTP) was first used in the intrinsic gettering (IG) process of fast neutron irradiated CZSi.
将快速热处理(RTP)引入到快中子辐照掺氮直拉硅的内吸杂工艺中。
Rapid thermal process (RTP) was used in the intrinsic gettering (IG) process of fast neutron irradiated CZSi.
研究了高温快速热处理(RTP)对重掺砷直拉硅片中的原生氧沉淀的消融作用。
The annihilation of grown-in oxygen precipitates in heavily As-doped CZ silicon by rapid thermal processing (RTP) was investigated.
研究了掺杂剂原子种类及快速热处理技术对大直径直拉硅单晶中空洞型微缺陷密度的影响。
After rapid thermal annealing(RTA) in Ar atmosphera at high temperature, the flow pattern defects(FPDs) density decreased more sharply in Sb-doped wafers than that in lightly B-doped wafers.
对于沉积态非晶薄膜,通过严格控制其快速热处理时间,从而制备出了部分晶化钡铁氧体薄膜。
Partially crystallized Ba ferrite thin films were prepared by the strict controlling of the rapid thermal annealing time for as deposited amorphous thin films.
本文研究了快速热处理工艺(RTP)在模拟的CMOS热处理工艺中对直拉硅单晶中氧沉淀和洁净区(DZ)的影响。
The effect of rapid thermal processing (RTP) on oxygen precipitates profile and denude zone (DZ) in Czochralski (CZ) silicon wafer during simulating CMOS processing is investigated.
快速热处理温度、时间、降温速度、退火气氛、掺杂原子等都对硅片中点缺陷的形成及分布产生影响,进而影响氧沉淀的形成。
The RTP temperature, the RTP time, the cooling rate, the ambient and the dopant atoms influenced the density and distribution of point defects in wafers, and then affected oxygen precipitates.
并结合热处理实验,采用任意分布光束热作用快速计算的数学工具对热作用结果进行比较研究。
Combining with the experiments of heat treatment, heat action results are compared by using fast calculation math tool of heat action of arbitrarily distributed beam.
快速铁路是束热处理铝合金型材中空截面,给高强度下的扭转和挠度应力。
The Speedy Rail beam is a heat-treated aluminium alloy profile with hollow cross-sections that give it high strength under torsion and deflection stresses.
试验结果表明:辅以超声波作用的电化学技术可以在常温下快速去除不锈钢表面的高温热处理致密氧化皮,恢复了不锈钢的金属色泽表面。
The results show that the electrochemical technology coupled with ultrasonic actions can remove oxide films rapidly at room temperature and renew the metallic luster of stainless steel.
实验表明,预备热处理采用快速球化退火(调质)得到的球化效果良好。
Experiments show that the rapid prepare heat treatment spheroidization annealing (conditioning) get good results of spheroidal graphite.
钻杆钢种水淬化后,焊缝热处理的冷却方式由以前的高压空气冷却转变为快速水冷却。
After the water quenching of the drill pipe steel grade, the cooling method of drill pipe welds is changed to the quick water cooling instead of the previous high-pressure air cooling.
结果表明,热处理不当导致材料力学性能偏低偏脆是齿轮轴发生快速脆性断裂的主要原因。
It is inferred that low strength and bad ductility which is induced by abnormal heat treatment are the cause of brittle fracture happening for the gear shaft.
并进一步建立了快速冷却条件下凝固潜热处理的模型。
A mathematical model was developed to ensure that the latent heat was dealt with appropriately under high cooling rate.
并进一步建立了快速冷却条件下凝固潜热处理的模型。
A mathematical model was developed to ensure that the latent heat was dealt with appropriately under high cooling rate.
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