high frequency ion etching
reactive ion beam etching system/RIBE system 反应性离子束蚀刻系统 high frequency ion etching 高频离子腐蚀 RIE Resctive Ion Etching 反应离子腐蚀 ..
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高频等离子体腐蚀 radio frequency plasma etch
·2,447,543篇论文数据，部分数据来源于NoteExpress
球经高频低压等离子体浸没离子注入及氮化处理后，样品表面的硬度、耐磨性和耐腐蚀性显著提高，具有较好的均匀性。
The hardness, wear resistance and corrosion resistance of the ball were significantly increased after the treatment of HLPIII, and had better uniformity.
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