radio frequency plasma etch
高频等离子体腐蚀
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球经高频低压等离子体浸没离子注入及氮化处理后,样品表面的硬度、耐磨性和耐腐蚀性显著提高,具有较好的均匀性。
The hardness, wear resistance and corrosion resistance of the ball were significantly increased after the treatment of HLPIII, and had better uniformity.
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