该方法在椭偏成像系统的应用结果验证了其有效性，调焦精度达到微米量级。
Experiment result from imaging ellipsometry system demonstrates its availability and its precision reaches micron order.
该方法能方便地实现自动调焦，且调焦精度高、体积小、结构简单、易于安装，具有一定的实用价值。
This method can easily realize automatic focusing, characterized by high focusing precision, small volume and simple structure, and easy installation and practical application values.
实验表明，差分式对比传递函数法调焦，具有调焦精度高，调焦速度快，受像移影响不明显，适应性好等优点。
It shows that the differential focussing method by comparing MTFs has perfect performances high speed, high precision focussing, not being affected by image displacement and flexibility etc.
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