该方法在椭偏成像系统的应用结果验证了其有效性，调焦精度达到微米量级。
Experiment result from imaging ellipsometry system demonstrates its availability and its precision reaches micron order.
该方法能方便地实现自动调焦，且调焦精度高、体积小、结构简单、易于安装，具有一定的实用价值。
This method can easily realize automatic focusing, characterized by high focusing precision, small volume and simple structure, and easy installation and practical application values.
实验表明，差分式对比传递函数法调焦，具有调焦精度高，调焦速度快，受像移影响不明显，适应性好等优点。
It shows that the differential focussing method by comparing MTFs has perfect performances high speed, high precision focussing, not being affected by image displacement and flexibility etc.
本报告介绍了一种新型内调焦对心器的原理、结构、精度分析、主要技术参数、特点、仪器的调整及使用。
The report talks about the principles, structure, accuracy analyses, main technical data, characteristics, adjustment and application of a new type internal focusing device for centring.
为了提高在激光直写设备中光刻系统的写入精度，对光探头调焦系统进行了研究。
To improve the precision of the laser direct writing device, researches have been done for the focusing servo system.
提出了一种可单帧判断图像是否清晰的方法，消除了图像在清晰情况下却触发调焦的误操作，从而提高了跟踪的可靠性和精度。
This dissertation puts forward a way on judging an image whether in focus by a single frame, and avoiding an error operation when the image in focus to spring focus.
仿真实验表明，这种粗精相结合的检调焦方法既能保证聚焦精度，又能提高聚焦速度。
The simulation results have shown that this method which combines rough and fine focus adjustment can ensure the focusing accuracy while improving the focusing speed.
仿真实验表明，这种粗精相结合的检调焦方法既能保证聚焦精度，又能提高聚焦速度。
The simulation results have shown that this method which combines rough and fine focus adjustment can ensure the focusing accuracy while improving the focusing speed.
应用推荐