脉冲高能量密度等离子体是一项全新的等离子体材料表面处理和薄膜制备技术。
The use of pulsed high energy density plasma is a new low temperature plasma technology for material surface treatment and thin film deposition.
特别是随着高温超导薄膜制备技术的不断提高，使其在电子信息领域中得到非常好的应用。
Especially, the High Temperature Superconductive (HTS) film is widely used in electronic field, as its manufacture technology improved continuously.
综述了透明导电氧化物（TCO）薄膜的结构、光电性能以及TCO薄膜制备技术的研究进展。
Progresses in research on microstructure, electrical and optical properties and preparation technology of TCO thin films are reviewed.
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