机械工程学报 01) 摘要: 给出采用原子力显微镜(Atomic force microscope,AFM)测量线宽粗糙度(Line width roughness,LWR)的分析步骤。分析线宽和LWR及其偏差随刻线横截面位置的高度变化的关系,线宽及其偏差和LWR及其偏差随
基于4个网页-相关网页
线宽随着样品表面粗糙度增加而变宽。
The line broad increases and is changed into width with sample surface roughness.
尖端曲率半径、针尖在基底表面滞留时间、针尖扫描速度、空气湿度、表面粗糙度等均会影响纳米结构的线宽。
The line width of nanostructures is influenced by many factors such as tip curvature radius, detained time in the base surface, scanning speed, humidity, surface roughness etc.
应用推荐