3．DBD等离子体在微电子工业方面的应用 类金刚石薄膜（Diamond like carbon，DLC）是一种亚稳态非晶碳材料，也是一种 宽禁带半导体。
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【摘要】： 正 碳膜因结构和性能类似金刚石,故也称类金刚石薄膜(Diamond-like Carbon Films)简称“DLC”膜。它具有硬度高、绝缘性能好、红外与可见光透明性好及高化学惰性等特殊性能,而且日益受到人们的重视。
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关键词: 类金刚石薄膜(DLC)；PECVD 法；薄膜结构；表面形貌 [gap=981]Key words: DLC thin film; PECVD method; thin film structure; surface morphology ...
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个类金刚石薄膜 Diamond like carbon ; DLC
由于类金刚石薄膜 Diamond-like Carbon films ; DLC
制备类金刚石薄膜 Diamond Like Carbon ; DLC
本论文以类金刚石薄膜 Diamond like carbon film ; DLC
引言类金刚石薄膜 DLC ; Diamond-like carbon films
论文以类金刚石薄膜 Diamond like carbon film
纳米类金刚石薄膜 nano DLC films
氟化类金刚石薄膜 f-dlc films
无氢类金刚石薄膜 hydrogen free diamond-like carbon film
最后将金刚石薄膜和类金刚石薄膜进行了简单比较。
At the end the comparison between Diamond Coatings and Diamond-like Coatings have been given.
喇曼光谱研究表明，这种薄膜是典型的无氢类金刚石薄膜。
Raman spectrum study shows that the film has typical pikes of hydrogen free diamond like carbon film.
采用过滤阴极电弧沉积方法有可能制成无宏观粒子的类金刚石薄膜。
It is possible to deposit DLC (Diamond-Like Carbon) without MP by filtered vacuum arc deposition.
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