... of Sensors and Actuators 关键词： 真空微电子，ASIC，低噪声，混频，相关检测 [gap=1178]Keywords: Vacuum microelectronic, ASIC, Low noise, frequency mixing, Coherent detection ..
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阐述了真空微电子触觉传感器的工作原理。
This paper describes principle of vacuum micro electron tactiles sensor.
介绍了真空微电子中金属尖阴极的制备方法。
This paper describes the method of metal tip fabrication for vacuum microelectronics.
提出了一种带过载保护功能的真空微电子压力传感器。
A vacuum micro-electronics pressure sensor with the function of overloading protection is brought forward.
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