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该方法的主要装置包括一个用于控制刻划机运动的光栅干涉仪和一个相位扫描机构。
The main devices of the method include a grating interferometer, which controls the ruling engine motion, and a phase scanning mechanism.
玫瑰扫描红外亚成像系统是利用玫瑰扫描机构和红外单元探测器构成的一种亚成像系统。
The infrared sub image system with rosette scanning is composed of a rosette scanning mechanism and a single element infrared detector.
垂直扫描机构是单晶片离子注入机靶盘的支撑部件，起着将高速直线运动从靶室外传递到靶盘的作用。
Vertical scanner is the supporting part of a series process ion implanter, which transfer high speed movement from outside of the chamber to the target inside.
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