本文在分析现有悬臂梁式小力值传感器的基础上，提出一种带有加速度补偿梁的传感器结构。
On he basis of analysis of the original cantilever type transducer measuring smaller force, a transducer structure with acceleration compensating beam is presented.
用加速度传感器和DSPS系统，实现了对悬臂梁结构的在线监测。
Monitoring online of the cantilevering beam can be realized through accelerating transducer and DSPS system.
微悬臂梁是一种结构简单、易于进行微加工以及大量生产的传感器结构。
Microcatilever is a kind of simple sensor configuration that is easily micromachined and mass produced.
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