本文在分析现有悬臂梁式小力值传感器的基础上，提出一种带有加速度补偿梁的传感器结构。
On he basis of analysis of the original cantilever type transducer measuring smaller force, a transducer structure with acceleration compensating beam is presented.
用加速度传感器和DSPS系统，实现了对悬臂梁结构的在线监测。
Monitoring online of the cantilevering beam can be realized through accelerating transducer and DSPS system.
微悬臂梁是一种结构简单、易于进行微加工以及大量生产的传感器结构。
Microcatilever is a kind of simple sensor configuration that is easily micromachined and mass produced.
研究了一种新型结构的光纤悬臂梁式振动传感器。
This paper deals with a novel type of optic fibre cantilever vibration sensor.
湿度传感器大致可以分为下列几种类型：电容式、电阻式、悬臂梁式、晶振式、以及热电偶式。
Humidity sensors can be categorized into capacitive, resistive, mechanical, oscillating and thermo elemental type based on the sensing principle used.
设计并制作了光纤光栅涡街流量传感系统，包括传感器封装法兰、等强度悬臂梁、涡街发生体等关键传感单元。
We designed and produced a fiber grating vortex Flow sensor system, including sensor package flange, uniform intensity cantilever, vortex generating body et al and other critical sensing units.
为获得用于 表面应力测量的压阻悬臂梁 传感器的参数的优化方法，建立了有限元分析模型。
A finite element model was used to optimize the parameters for a surface-stress sensitive piezoresistive microcantilever sensor.
基于MEMS技术和SOICMOS技术提出了一个包含放大电路与悬臂梁式压阻传感器的集成化方案。
This paper presented an on-chip integration of SOI (Silicon on insulator) CMOS analog IC and piezoresistive cantilever based on the techniques of MEMS and SOI CMOS.
通过将模拟结果与压阻理论结合，分析了 表面应力作用下的压阻式微型悬臂梁 传感器。
The piezoresistive microcantilever sensors were optimized for various doping types by combining simulation and piezoresistive theory.
通过将模拟结果与压阻理论结合，分析了 表面应力作用下的压阻式微型悬臂梁 传感器。
The piezoresistive microcantilever sensors were optimized for various doping types by combining simulation and piezoresistive theory.
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