微机电 MEMS ; CMOS-MEMS ; Micro-Electro-Mechanical Systems ; MEMS Module
微机电系统 MEMS ; Micro Electro Mechanical Systems ; Micro-Electro-Mechanical Systems
射频微机电系统 RF MEMS
微机电系统显示器 DMD
射频微机电 RF MEMS
微机电系统设计 Introduction to MEMS Design ; micro-electro-mechanical system design
微机电组件 MEMS Components
微机电陀螺仪 MEMS Gyroscope
微机电工程 MEMS
微机电麦克风 MEMS Microphone
介绍了微机电系统当前的进展与发展前景。
介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。
This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.
对投影型微光学编码器的原理进行了分析，结合微机电系统集成技术，提出并实现了投影型微光学编码器。
The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
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