介绍了微机电系统当前的进展与发展前景。
提出一种新型的胶囊式药物释放微机电系统的设计模型。
微胶接技术非常适用于微机电系统产品的自动化装配过程。
Micro adhesive bonding technology shows great potential in the assembly of micro-electro-mechanical system (MEMS) products.
基于压电薄膜的压电效应，研究压电薄膜微机电加速度传感器。
A micromachined accelerometer with piezoelectric thin film based on the piezoelectric effect is studied.
电参量测量精度和响应时间是微机电量变送器两个重要的性能指标。
The measuring precision and response time of electrical parameters is two important characteristic indexes of the electrical quantity transducer.
传感器对被测对象的负荷效应是微机电系统中不可忽视的一个问题。
The loading effect of sensors is often an inevitable problem in micro-electromechanical systems(MEMS).
依据雷电波侵入变电站微机电源的途径，建立模型，并进行了分析。
A model was build and experimented along the path of lightning surge invasion.
作为实例本文将介绍这种数据变换系统在微机电话问卷系统中的应用。
As an application, we describe its implementation in the microcomputer telephone inquiring system.
介绍了基于微机电一体化系统（MEMS）的微槽冷却系统的研究成果。
The research on microchannel cooling system based on MEMS was introduced in this paper.
微执行器是微机电系统的核心部件，应用范围广泛，具有重要的研究价值。
Micro actuator is the kernel part of MEMS, with wide application range and important research value.
介绍了微机电系统的基本概念和医用微机电系统的应用前景及其关键技术。
This paper presents the basic concept of the microelectronic mechanical system (MEMS), its future applications in medical fields and its key technologies.
提出了一种纤毛式微机电系统(MEMS)矢量水声传感器的仿生组装技术。
A hair cell vector hydrophone based on micro electro mechanical system (MEMS) was presented in this paper.
本文主要研究了微机电陀螺的误差分析、建模和补偿，以及在飞行器导航中的应用。
Error analysis, modeling and compensation of MEMS gyroscope and its application in navigation of flight vehicle are researched in this paper.
回顾了目前利用微机电（MEMS）技术在高效并行显微注射和胚胎定位方面的工作；
In this paper, we reviewed our work on high -throughput microinjection and positioning of embryos using the MEMS technologies.
随着微机电系统(MEMS)设计日趋成熟，度量问题越来越成为微系统技术中的热点。
With the maturing design of micro electrical mechanism systems (MEMS), the metrology for MEMS is becoming the hot research in the micro system technology.
微机电系统(MEMS)的计算机辅助设计(CAD)是MEMS实现商品化的重要基础。
Computer aided design (CAD) of Microelectromechanical systems (MEMS) is a significant foundation for commercialization of MEMS.
微机电系统是具有广泛应用前景的新兴学科，微加工工艺是实现微机电系统的关键技术。
The micro electro mechanical system(MEMS) is a new developed subject with a broad range in applications, and microfabrication process sequences is a key technology for the realization of the MEMS.
无线传感器网络随着传感器技术、微机电系统、现代网络和无线通信等技术的进步孕育而生。
With the development of sensors technology, Micro-Electro-Mechanism System(MEMS), modern networks and wireless communication technology, wireless sensor network (WSN) comes out and develops gradually.
采用传输矩阵法对反射模式下的微机电可调谐垂直腔半导体光放大器的波长调谐特性进行研究。
The wavelength tuning of MEMS-based tunable vertical cavity semiconductor optical amplifiers (VCSOAs) at reflection mode are studied using transfer matrix method.
建立了用来检测微机电系统谐振器面内运动的激光差动多普勒系统，测量了谐振器的振动速度。
A differential laser Doppler system is built to measure the in-plane movement of micro-electro-mechanical systems (MEMS), and the vibration of a MEMS resonator has been measured.
公伯峡水电厂调速器采用微机电液调速器加电液随动装置的系统结构，电气柜和机械柜分开设置。
The regulator of Gongboxia hydropower station adopts microcomputer-based electrohydraulic regulator adding servo devices system structure, dividually setting electrical cabinet and mechanical cabinet.
首先介绍了用于建筑结构健康监测的主要技术，阐述了新型微机电技术应用于结构健康监测的优势。
This paper firstly introduces the main traditional technology for structural health monitoring, and then describes the new method based on MEMS and its advantages.
论述了微机电系统的技术特征、主要技术和加工工艺，并展望了微机电系统在航天器上的应用前景。
This paper presents the technical characteristics, key technologies and the manufacture processes of MEMS, Its applications in spacecraft are also addressed.
微机电陀螺与传统的机电类陀螺和光电类陀螺相比，具有成本低、尺寸小、重量轻、可靠性高等优点。
Comparing with conventional electro-mechanical gyroscope and electro-optical gyroscope, MEMS gyroscope has the advantages of low cost, small size, low weight and high reliability.
微机电系统(MEMS)是近年来兴起的一门新兴技术，微行星齿轮减速器是微机电系统中的重要器件。
Micro Electro Mechanical System (MEMS) is a course of new technology rising in recent years. Micro planetary gear reducer is the important part in MEMS.
本文概括地介绍微机电系统学科的重大意义，十三年来中国MEMS研发的总体概况，以及关注的热点。
Significance and characteristic of MEMS, research and development of MEMS in China in the past thirteen years and interesting points have been summarized in this paper.
对投影型微光学编码器的原理进行了分析，结合微机电系统集成技术，提出并实现了投影型微光学编码器。
The principle of projection type micro optical encoder has been described and the optics theory of grating imaging is deduced.
微机电系统和传感器制造商MEMSIC，正计划在其IRIS 传感器上使用 MoteRunner。
MEMSIC, a micro-electromechanical systems and sensor manufacturer, plans to offer Mote Runner on its popular IRIS sensor.
微机电系统和传感器制造商MEMSIC，正计划在其IRIS 传感器上使用 MoteRunner。
MEMSIC, a micro-electromechanical systems and sensor manufacturer, plans to offer Mote Runner on its popular IRIS sensor.
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