In the thesis, three methods of semi-analytic macro modeling compatible with different terms are studied and realized to solve the questions of typical MEMS devices such as the torsion micro mirror, fixed-fixed micro beam, capacitive pressure sensor, etc.
论文结合扭转微镜、微梁、电容式压力传感器等典型MEMS器件对三种宏建模方法的适应性和有效性进行了分析。
参考来源 - 面向器件行为的MEMS宏建模方法研究The physical model of resistance,inductance and condenser RLC circuit and micro-beam coupled system is presented. According to the Largrange-Maxwell’s equation,the mathematical model of the RLC circuit and micro-beam coupled system is established.
根据电阻电感电容RLC电路与微梁耦合系统物理模型,利用拉格朗日-麦克斯韦方程建立了反映RLC电路与微梁机电耦合特征的数学模型。
参考来源 - RLC串联电路与微梁耦合系统的吸合电压与电振荡·2,447,543篇论文数据，部分数据来源于NoteExpress
该方案对微梁多阵列传感器研制开发提出了一个新的思路。
This method provided a simple way to design micro-cantilever array based on optical lever in the future.
利用解析方法分析了基座变形对微梁共振器固有频率的影响。
The effect of base structural deformation on inherent frequency of a microbeam resonator is analyzed by using analytical method.
此时细胞核偏向一边，但细胞的其余部位仍充满了胞质微梁骨架。
At this time the nucleus moved aside from center of the PMC, but the rest of the cell was still fulfilled with MN filaments.
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